| Preface |
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xi | |
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1 | (18) |
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1.1 Sensors in Mechatronics |
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1 | (12) |
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1 | (2) |
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3 | (1) |
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1.1.3 Sensor Nomenclature |
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4 | (2) |
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1.1.4 Sensors and Information |
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6 | (7) |
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13 | (6) |
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19 | (16) |
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19 | (7) |
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2.1.1 Classification of Quantities |
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19 | (4) |
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2.1.2 Relations Between Quantities |
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23 | (3) |
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2.2 Sensor Classifications |
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26 | (9) |
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2.2.1 Classification Based on Measurand and Application Field |
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26 | (1) |
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2.2.2 Classification Based on Port Models |
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26 | (4) |
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2.2.3 Classification Based on Conversion Principles |
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30 | (1) |
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2.2.4 Classification According to Energy Domain |
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31 | (4) |
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35 | (22) |
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35 | (5) |
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36 | (1) |
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3.1.2 Non-linearity and Hysteresis |
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36 | (1) |
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37 | (1) |
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38 | (1) |
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3.1.5 Offset and Zero Drift |
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38 | (1) |
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38 | (1) |
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39 | (1) |
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3.1.8 Frequency Response and Bandwidth |
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39 | (1) |
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3.1.9 Operating Conditions |
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39 | (1) |
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3.2 Sensor Error Reduction Techniques |
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40 | (17) |
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41 | (3) |
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44 | (3) |
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47 | (1) |
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48 | (3) |
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51 | (2) |
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53 | (4) |
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57 | (44) |
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4.1 Resistivity and Resistance |
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57 | (1) |
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4.2 Potentiometric Sensors |
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58 | (9) |
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4.2.1 Construction and General Properties |
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58 | (1) |
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4.2.2 Electrical Characteristics |
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59 | (2) |
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61 | (3) |
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4.2.4 Contact-Free Potentiometers |
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64 | (2) |
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4.2.5 Applications of Potentiometers |
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66 | (1) |
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67 | (10) |
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4.3.1 Construction and Properties |
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67 | (4) |
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71 | (2) |
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4.3.3 Applications of Strain Gauges |
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73 | (4) |
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4.4 Piezoresistive Sensors |
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77 | (10) |
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77 | (4) |
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4.4.2 Micromachined Piezoresistive Sensors |
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81 | (2) |
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4.4.3 Applications of Piezoresistive Sensors |
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83 | (4) |
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4.5 Magnetoresistive Sensors |
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87 | (4) |
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87 | (4) |
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4.5.2 Applications of Magnetoresistive Sensors |
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91 | (1) |
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4.6 Thermoresistive Sensors |
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91 | (4) |
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91 | (1) |
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4.6.2 Resistance Thermometer |
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92 | (1) |
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93 | (2) |
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4.7 Optoresistive Sensors |
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95 | (6) |
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101 | (24) |
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5.1 Capacitance and Permittivity |
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101 | (4) |
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5.2 Basic Configurations of Capacitive Sensors |
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105 | (8) |
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5.2.1 Flat-Plate Capacitive Sensors |
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105 | (4) |
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5.2.2 Multiplate Capacitive Sensors |
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109 | (1) |
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5.2.3 Silicon Capacitive Sensors |
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110 | (3) |
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113 | (3) |
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116 | (9) |
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5.4.1 Capacitive Sensors for Position- and Force-Related Quantities |
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116 | (2) |
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5.4.2 Particular Applications |
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118 | (7) |
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6 Inductive and Magnetic Sensors |
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125 | (36) |
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6.1 Magnetic and Electromagnetic Quantities |
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125 | (5) |
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6.1.1 Magnetic Field Strength, Magnetic Induction and Flux |
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125 | (2) |
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127 | (1) |
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128 | (1) |
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6.1.4 Magnetic Resistance (Reluctance) and Self-Inductance |
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128 | (1) |
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129 | (1) |
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6.2 Magnetic Field Sensors |
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130 | (6) |
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131 | (1) |
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131 | (3) |
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134 | (2) |
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6.3 Magnetic and Induction Based Displacement and Force Sensors |
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136 | (11) |
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6.3.1 Magnetic Proximity Switches |
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137 | (1) |
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6.3.2 Inductive Proximity and Displacement Sensors |
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138 | (1) |
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6.3.3 Eddy Current Displacement Sensors |
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139 | (2) |
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6.3.4 Variable Differential Transformers |
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141 | (2) |
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6.3.5 Resolvers and Synchros |
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143 | (2) |
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6.3.6 Magnetostrictive or Elastomagnetic Sensors |
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145 | (2) |
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147 | (14) |
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6.4.1 Interfacing Inductive Sensors |
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148 | (1) |
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6.4.2 Contact-Free Sensing Using Magnetic and Inductive Sensors |
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149 | (1) |
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6.4.3 Applications of Variable Reluctance and Eddy Current Sensors |
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150 | (3) |
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6.4.4 Applications of Other Inductive Sensors |
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153 | (8) |
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161 | (58) |
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7.1 Electro-Optical Components |
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161 | (9) |
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162 | (3) |
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165 | (2) |
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7.1.3 Position Sensitive Diode |
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167 | (3) |
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7.2 Optical Displacement Sensors |
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170 | (18) |
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7.2.1 Intensity Measurement |
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170 | (3) |
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173 | (3) |
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176 | (6) |
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182 | (6) |
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188 | (1) |
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188 | (3) |
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7.3.1 LEDs and Photo Diodes |
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188 | (2) |
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190 | (1) |
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191 | (28) |
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7.4.1 Linear Displacement Sensing |
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192 | (7) |
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7.4.2 Angular Displacement Sensing |
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199 | (2) |
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201 | (3) |
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204 | (4) |
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208 | (3) |
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7.4.6 Force, Torque and Strain Sensing |
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211 | (8) |
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219 | (22) |
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219 | (9) |
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8.1.1 Piezoelectric Materials |
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219 | (2) |
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8.1.2 Piezoelectric Parameters |
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221 | (7) |
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8.2 Force, Pressure and Acceleration Sensors |
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228 | (4) |
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228 | (2) |
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8.2.2 Characteristics of Accelerometers |
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230 | (2) |
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232 | (2) |
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234 | (7) |
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8.4.1 Stress and Pressure |
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235 | (1) |
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235 | (1) |
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236 | (5) |
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241 | (34) |
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9.1 Properties of the Acoustic Medium |
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241 | (4) |
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9.1.1 Sound Intensity and Pressure |
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242 | (1) |
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9.1.2 Sound Propagation Speed |
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242 | (1) |
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243 | (1) |
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244 | (1) |
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245 | (7) |
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245 | (3) |
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9.2.2 Electrostatic Transducers |
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248 | (1) |
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9.2.3 Piezoelectric Transducers |
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249 | (2) |
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251 | (1) |
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252 | (7) |
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253 | (2) |
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9.3.2 Continuous Sine Wave (CW) |
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255 | (1) |
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9.3.3 Frequency-Modulated Continuous Waves (FMCW) |
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256 | (3) |
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259 | (1) |
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259 | (16) |
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259 | (5) |
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264 | (11) |
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Appendix A Symbols and Notations |
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275 | (12) |
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A.1 The Electrical Domain |
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275 | (2) |
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277 | (1) |
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A.3 The Mechanical Domain |
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277 | (3) |
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280 | (7) |
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280 | (3) |
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A.4.2 Radiant Energy from a Unit Surface with Lambertian Emission |
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283 | (1) |
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A.4.3 Derivation of Relations Between Intensity and Distance |
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284 | (3) |
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Appendix B Relations Between Quantities |
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287 | (8) |
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B.1 Generalized Equations |
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287 | (2) |
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B.2 Application to Four Domains |
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289 | (3) |
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292 | (3) |
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Appendix C Basic Interface Circuits |
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295 | |
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C.1 Operational Amplifier |
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295 | (2) |
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C.2 Current-to-Voltage Converter |
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297 | (1) |
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C.3 Non-Inverting Amplifier |
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298 | (2) |
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300 | (1) |
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C.5 Comparator and Schmitttrigger |
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301 | (2) |
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301 | (1) |
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302 | (1) |
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C.6 Integrator and Differentiator |
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303 | (4) |
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304 | (1) |
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304 | (3) |
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307 | |